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HORIBA質量流量控制器

D212 D214壓力鈍感質量流量計

產品分類:HORIBA質量流量控制器

產品介紹

概要

高穩定性的質量流量計-氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測,采用壓力鈍感模式

特征

  • 采用不同壓力感測即鈍感模式
  • 縮小氣體柜的體積(不再需要壓力傳感器,調壓閥和過濾器)
  • 流量控制量程范圍廠
  • 精度高
  • 提高產能-可以提供標準流量給半導體制程。

規格

 

 

D212

 Maximum Full-Scale (N2)

10 / 20 / 30 / 40sccm

50sccm ~ 10slm

 Operating  Inlet  Pressure

14kPa (g) ~ 350kPa (g)

250kPa(g) ~ 350kPa(g)

 Maximum Outlet  Pressure

≤13.3kPa (a)

≤53.3kPa (a)

≤13.3kPa(a)

≤53.3kPa(a)

 Accuracy under Digital mode
  (per SEMI Standard E56-1296)

±1% S.P.
(35 ~ 100%)
±0.35% F.S.
(2.5 ~ 35%)   

±1% S.P.
( 50 ~ 100%)
±0.5% F.S.
(30 ~ 50%)  

±1% S.P.
( 5 ~ 100%)
±0.05% F.S.
(0.5 ~ 5%) 

±1% S.P.
( 10 ~ 100%)
±0.1% F.S.
(2 ~ 10%)  

 Control Range under Digital mode (% F.S.)

2.5% ~ 100%

30 ~ 100% 

 0.5 ~ 100%

2 ~ 100%

 Recommended Re-Zero Term

once/ year

 Valve Type (PIEZO)

Normally Close

 Linearity

  ±0.5% F.S.

 Repeatability

±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)

 Response Time

 800 msec.

 Proof Pressure

500kPa(g)

 Burst Pressure

1MPa(g)

 Leak Integrity

<5×10-12 Pa·m3/s (He)

 Wetted Materials

SUS-316L , INCONEL

 Operating Temperature

15 ~ 45°C

 Flow Rate Setting Signal

0 ~ 5VDC or RS485 F-NET Protocol

 Flow Rate Output Signal

0 ~ 5VDC or RS485 F-NET Protocol

 Power Requirement

± 15V ± 5%, 150 mA 

 Fittings

1.125inch width 1/4VCR , C-seal , W-seal

 Installation Orientation

Attitude Insensitive

 

D214

Maximum Full-Scale (N2)

10 / 20 / 30 / 40sccm

50sccm ~ 10slm

Operating Inlet Pressure

14kPa (g) ~ 350kPa (g)

250kPa(g) ~ 350kPa(g)

Maximum Outlet Pressure

≤13.3kPa (a)

≤53.3kPa (a)

≤13.3kPa(a)

≤53.3kPa(a)

Accuracy under Digital mode
(per SEMI Standard E56-1296)

±1% S.P. (35 ~ 100%)
±0.35% F.S. (2.5 ~ 35%)

±1% S.P. ( 50 ~ 100%)
±0.5% F.S. (30 ~ 50%)

±1% S.P. ( 5 ~ 100%)
±0.05% F.S. (0.5 ~ 5%)

±1% S.P. ( 10 ~ 100%)
±0.1% F.S. (2 ~ 10%)

Control Range under Digital mode

2.5% ~ 100% F.S.

30 ~ 100% F.S.

0.5 ~ 100% F.S.

2 ~ 100% F.S.

Recommended Re-Zero Term

once/ year

Valve Type (PIEZO)

Normally Close

Linearity

±0.5% F.S.

Repeatability

±0.3% S.P. ( 10~100%)
±0.03% F.S. ( <10%)

Response Time

800 msec.

Proof Pressure

500kPa(g)

Burst Pressure

1MPa(g)

Leak Integrity

<5×10 -12 Pa·m 3 /s (He)

Wetted Materials

SUS-316L , INCONEL

Operating Temperature

15 ~ 45°C

Flow Rate Setting Signal

Device Net

Flow Rate Output Signal

Device Net

Power Requirement

11~25VDC 4VA

Fittings

1.125inch width 1/4VCR , C-seal , W-seal

Installation Orientation

Attitude Insensitive

NOTE

 

There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it.

 

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